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5. Mapping Correction

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Overview

The second step in the Morpheus™ processing pipeline is to apply mapping correction to the UUT data to transform the measurement data from a regular grid of equally spaced points on the CGH into a regular grid of equally spaced X and Y points at the UUT measuring the height departure from the ideal UUT surface along the surface normal at each point. This step is required to ensure that the UUT measurement data is accurate reported at the correct lateral coordinates. Once this step is complete, you can remove surface terms as you normally would in your interferometer software without introducing additional surface figure errors. Tip and tilt are removed automatically by Morpheus™ at this stage, unless specified otherwise via the settings menu.

The mapping is accomplished by creating a relationship between the as-designed equally spaced grid of normal rays on the UUT and the intersections of those rays at the CGH. Using this relationship, the measured grid of points is transformed from their position on the CGH substrate plane to the UUT surface.

Viewing Apply Mapping Correction Results

Morpheus™ will automatically apply the mapping correction to the UUT measurement data. You can view the results of the mapping correction by clicking on the ‘Mapping Correction’ button in the Data Processing panel of the Morpheus™ window. See below for an example of what the results should look like.

The results of the mapping correction are shown in the main window of Morpheus™:

  1. Click on the ‘Mapping Correction’ button to view the results from this data processing step.
  2. The grid of points in the top left panel of the Morpheus™ graphics window show where a set of rays representing UUT surface normals at equally spaced coordinates on the UUT intersect the CGH.
  3. The grid of points in the lower left panel of the Morpheus™ graphics window show the set of equally spaced coordinates on the UUT that correspond to the CGH intersection coordinates in the figure above.
  4. The source UUT surface error map, at the substrate domain, which represents the measured UUT surface error after substrate correction, is provided in the top right panel.
  5. The transformed map, which represents the UUT surface error mapped to a regular grid of points (with lateral units of mm) on the UUT, is shown on the bottom right panel of the Morpheus™ graphics window. If selected, the X and y tilt that was removed is displayed above the map to provide additional map information.

 

Next Steps

You are now ready to proceed with analyzing the alignment errors in your mapping-corrected UUT measurement data. Please see the Fitting and Removing Alignment Errors (Alignment Correction) section of this manual for details on how to fit and remove misalignment errors from your data.

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