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CGH Fabrication

CGHs are binary gratings written on photomasks using technology that was developed for the semiconductor industry: e-beam machines or laser writers

  • The binary grating can be either chrome-on-glass which is referred to as an Amplitude type CGH, or etched-glass which is referred to as a Phase type CGH.  (Learn more about the difference between these two CGH types here).
  • Phase CGHs require additional processing steps for substrate etching and chrome removal.

A flow-chart of this process is shown below.

 

Learn more about AOM Metrology CGHs here.
Learn more about CGH Applications here.
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