Catseye Pair Alignment Pattern (CE-P)
|Name & ID||Symbol||Typical Target Used||DOF and Sensitivity||Description|
|Catseye Pair (CE-P)||UUT Surface||Coarse (visual) to fine interferometric alignment of dZ||A pair of patterns are focused on the UUT optical surface. Light is sent from one pattern, gets reflected by the UUT, and is received by the other pattern.|
Catseye Pair (CE-P) allow accurate dZ alignment of UUT by assessing power fringes in the pair of patterns (which appear locally as tilt fringes).
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