What is the typical accuracy of a CGH?

CGH errors derive from various sources, from the digitization of the curved diffraction features to pattern writing accuracy, etching accuracy, and substrate wavefront error.

The way CGH error manifests as wavefront error also depends on the test geometry and test optic prescription.

Typical wavefront error contributed by a CGH (once substrate transmitted wavefront error map is subtracted) ranges from 1-5 nm RMS.